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US 11,014,814 B2Granted
Vanadium nitride film, and member coated with vanadium nitride film and method for manufacturing the same
AssigneeDowa Thermotech Co., Ltd.
InventorsSatoru Habuka, Hiroyuki Matsuoka, Wataru Sakakibara
Life of this patent
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Abstract
In a vanadium nitride film formed on a surface of a base material, a ratio V [at %]/N [at %] between a vanadium element concentration and a nitrogen element concentration in the film is 1.08 or more and a chlorine element concentration in the film is 1 at % or more and 5 at % or less.
Claims4
A vanadium nitride film formed on a surface of a base material,
- wherein a ratio V [at %]/N [at %] between a vanadium element concentration and a nitrogen element concentration in the film is 1.08 or more and a chlorine element concentration in the film is 1 at % or more and 5 at % or less;
- and
- wherein a total of the vanadium element concentration and the nitrogen element concentration is 90 at % or more.
A member coated with a vanadium nitride film,
- wherein a vanadium nitride film having a ratio V [at %]/N [at %] between a vanadium element concentration and a nitrogen element concentration of 1.08 or more and a chlorine element concentration of 1 at % or more and 5 at % or less is formed on a surface of a base material;
- and
- wherein a total of the vanadium element concentration and the nitrogen element concentration is 90 at % or more.
Dependencies are inferred from the claim text.