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AssigneeSCREEN Holdings Co., Ltd.
InventorsToru Endo, Masayuki Hayashi, Nobuyuki Shibayama, Hideji Naohara, Hiroaki Kakuma, Yuji Okita, Tatsuya Masui
Estimating the term…
In equipment that supplies a processing liquid on a top surface of a substrate while holding the substrate horizontally in a chamber a generation status of fumes is determined. Specifically, an image of a predetermined imaging area in the chamber is captured. Then, the generation status of fumes in the chamber is determined based on luminance values of the captured image acquired by the capturing of an image. Accordingly, it is possible to quantitatively determine whether a generation status of fumes in a chamber is normal.
A fume determination method of determining a generation status of fumes in equipment that supplies a processing liquid on a top surface of a substrate while holding the substrate horizontally in a chamber, the fume determination method comprising:
A substrate processing method in equipment that supplies a processing liquid to a top surface of a substrate while holding the substrate horizontally in a chamber, the equipment comprising a cup that surrounds the substrate and an exhaust unit that discharges a gas from a space inside the cup to the outside of the chamber, the substrate processing method comprising:
Dependencies are inferred from the claim text.