Advanced sputter targets for ion generation
AssigneeApplied Materials, Inc.
InventorsGraham Wright, Klaus Becker
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Abstract
An advanced sputter target is disclosed. The advanced sputter target comprises two components, a porous carrier, and a metal material disposed within that porous carrier. The porous carrier is designed to be a high porosity, open cell structure such that molten material may flow through the carrier. The porous carrier also provides structural support for the metal material. The cell sizes of the porous carrier are dimensioned such that the capillary action and surface tension prohibits the metal material from spilling, dripping, or otherwise exiting the porous carrier. In some embodiments, the porous carrier is an open cell foam, a weave of strands or stacked meshes.
Claims9
An ion source for generating an ion beam comprising a metal material, comprising:
- an arc chamber having a first end, an opposite second end and walls connecting the first end and the second end, wherein one of the walls comprises an extraction aperture;
- a cathode disposed at the first end;
- and
- a sputter target disposed within the arc chamber, the sputter target comprising a porous carrier, and a metal material disposed within the porous carrier.
A physical vapor deposition apparatus, comprising:
- a physical vapor deposition (PVD) chamber;
- a cathode disposed in the PVD chamber, wherein the cathode is biased using a cathode power supply;
- and
- a sputter target disposed within the PVD chamber, the sputter target comprising a porous carrier, and a metal material disposed within the porous carrier, and in communication with the cathode power supply.
Dependencies are inferred from the claim text.