# US 11,004,652 B2 · Ion milling device

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- Number: US 11,004,652 B2
- Document ID: US11004652B2
- Status: Granted
- Kind: B2
- Application number: 16/642,231
- Filed: 2017-09-15
- Published: 2020-11-12
- Granted: 2021-05-11
- Earliest claimed: 2017-09-15
- Assignees: Hitachi High-Tech Corporation
- Applicants: Hitachi High-Technologies Corporation
- Inventors: Asako Kaneko; Hisayuki Takasu
- Web page: https://patentgrep.com/patent/US11004652B2

## CPC

- H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H01J 37/08: Ion sources; Ion guns
- H01J 37/09: Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
- H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)}
- H01J 37/305: for casting, melting, evaporating, or etching
- H01J 37/31: for cutting or drilling
- H01J 2237/022: Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
- H01J 2237/024: Moving components not otherwise provided for
- H01J 2237/081: Sputtering sources
- H01J 2237/20257: Magnetic coupling
- H01J 2237/31745: for preparing specimen to be viewed in microscopes or analyzed in microanalysers
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

An object of the present invention is to provide a technique for reducing a phenomenon in which fine particles derived from a sample and bounced off by ion beam irradiation are reattached to an ion milling surface. An ion milling device of the invention includes an ion source which emits an ion beam, a chamber, a sample table in which a sample is placed in the chamber, and a shielding plate placed on the sample, and by having a magnet disposed in the chamber, reattachment of fine particles derived from the sample can be reduced.

## Claims

### Claim 1

An ion milling device, comprising:
a chamber;
a sample table made of a non-magnetic material and on which a sample is placed in the chamber;
a shielding plate placed on the sample; and
an ion source which is placed so as to face an upper surface of the sample table and emits an ion beam, wherein
a magnet holding plate made of a non-magnetic material in which a first magnet is detachably disposed on the upper surface of the sample table and the sample is placed on an upper surface of the magnet holding plate when the first magnet is disposed on the sample table.

### Claim 2 (depends on 1)

The ion milling device according to claim 1, wherein
a second magnet is disposed on a lateral side of the sample.

### Claim 3 (depends on 2)

The ion milling device according to claim 2, wherein
the first magnet is disposed on the sample table and the second magnet is disposed on the lateral side of the sample.

### Claim 4 (depends on 1)

The ion milling device according to claim 1, comprising
a holder for detachably holding the first magnet.

### Claim 5 (depends on 2)

The ion milling device according to claim 2, comprising:
a moving mechanism for the second magnet.

### Claim 6 (depends on 1)

The ion milling device according to claim 1, wherein
the first magnet is a permanent magnet.

### Claim 7 (depends on 6)

The ion milling device according to claim 6, wherein
the permanent magnet has a maximum magnetic force of about 300 gauss to 400 gauss.

### Claim 8 (depends on 1)

The ion milling device according to claim 1, wherein
the magnet holding plate has a cavity, and
an arrangement position of the first magnet can be adjusted in the cavity of the magnet holding plate.

### Claim 9 (depends on 1)

The ion milling device according to claim 1, wherein
the sample table has a magnet holder, and
the first magnet can be removed from below the sample table by removing the magnet holder of the sample table.