Ultra-wide-band saw sensor with hyperbolically frequency-modulated etched reflector
AssigneeResonant Inc.
InventorViktor Plesski
Life of this patent
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Abstract
There is disclosed a surface acoustic wave sensor. An interdigital transducer (IDT) and a first reflector are formed on a surface of a piezoelectric substrate. The first reflector is displaced from the IDT in a direction of acoustic wave propagation. The first reflector includes a plurality of elongate reflective elements including a first reflective element and N additional reflective elements, where N is a positive integer. A long axis of each of the reflective elements is perpendicular to the direction of acoustic wave propagation, and a distance between adjacent reflective elements along the direction of acoustic wave propagation is a linear function of distance from the first reflective element along the direction of acoustic wave propagation.
Claims21
A surface acoustic wave sensor, comprising:
- a piezoelectric substrate;
- an interdigital transducer (IDT) formed on a surface of the substrate;
- and
- a first reflector formed on the surface of the substrate, the first reflector displaced from the IDT in a direction of acoustic wave propagation, wherein
- the first reflector comprises a plurality of elongate reflective elements including a first reflective element and N additional reflective elements, where N is a positive integer,
- a long axis of each of the reflective elements is perpendicular to the direction of acoustic wave propagation, and
- a distance between adjacent reflective elements along the direction of acoustic wave propagation is a linear function of distance from the first reflective element along the direction of acoustic wave propagation.
A passive sensor system, comprising:
- a surface acoustic wave sensor comprising:
- a piezoelectric substrate;
- an interdigital transducer (IDT) formed on a surface of the substrate;
- a first reflector formed on the surface of the substrate, the first reflector displaced from the IDT in a direction of acoustic wave propagation by a first distance;
- and
- a second reflector formed on the surface of the substrate, the second reflector displaced from the IDT in a direction of acoustic wave propagation by a second distance different from the first distance, wherein
- each of the first and second reflectors comprise respective first and second pluralities of elongate reflective elements, each plurality of reflective elements including a first reflective element and N additional reflective elements, where N is a positive integer,
- a long axis of each of the reflective elements is perpendicular to the direction of acoustic wave propagation, and
- for each of the first and second pluralities of reflective elements, a distance between adjacent reflective elements along the direction of acoustic wave propagation is a linear function of distance from the first reflective element along the direction of acoustic wave propagation.
Dependencies are inferred from the claim text.