Positioning system and lithographic apparatus

A positioning system for positioning an object, the positioning system comprising:

• a stage configured to hold the object, the stage being moveable in a first direction in a movement range and comprising a short-stroke module configured to hold the object and a long-stroke module arranged to move the short-stroke module relative to the long-stroke module;
• a balance mass;
• and
• an actuator system configured to drive the stage in the first direction while driving the balance mass in a second direction opposite to the first direction and arranged to move the long-stroke module relative to the balance mass, an actuator of the actuator system to drive the stage having a coil on the stage or balance mass and a magnet cooperating with the coil on the other of the stage or balance mass such that a reaction force to driving the stage drives the balance mass in the second direction,
• wherein, when the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass,
• wherein the stage has a first surface forming a front surface when moving in the first direction, the balance mass has a second surface, and the stage is arranged to collide with the front surface into the second surface, and
• wherein the short-stroke module and/or the long-stroke module comprises the front surface.