Cutting oil composition
AssigneeYoung Chang Chemical Co., Ltd
InventorsSeung Hun Lee, Seung Hyun Lee, Seong Hwan Kim, Gyeong Guk Ham
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Abstract
Disclosed is a cutting oil composition, which is vastly superior in view of layer separation, dispersibility, viscosity, ingot-cleaning time after sawing, and wafer warpage after sawing, compared to conventional cutting oil compositions, and which includes mineral oil that is highly hydrogenated, as represented by Chemical Formulas 1 to 3, bentonite clay as a thickener, and glycerol trioleate as a dispersant. A cutting method using the cutting oil composition is also provided.
Claims5
A cutting oil composition, comprising a mixture of mineral oil represented by Chemical Formula 1, mineral oil represented by Chemical Formula 2 and mineral oil represented by Chemical Formula 3,
- wherein Formula 1 is R1-(CnH2n−4)a-R2,
- wherein Formula 2 is R3-(CnH2n−2)b-R4,
- wherein Formula 3 is R5-(CnH2n)c-R6,
- wherein n is 5 or 6, and R1, R2, R3, R4, R5 and R6 are each H or OH, and
- wherein a is 7 to 20 b is 39 to 52 and c is 39 to 41.
Dependencies are inferred from the claim text.