Mask frame assembly including both frame and mask plate fixed on frame, and evaporation apparatus
AssigneesBoe Technology Group Co., Ltd., Ordos Yuansheng Optoelectronics Co., Ltd.
InventorsFengli Ji, Shanshan Bai, Yinan Liang
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Abstract
A mask frame assembly and an evaporation apparatus are disclosed. The mask frame assembly comprises a frame and a mask plate fixed on the frame. The mask frame assembly is provided with alignment marks, which comprise a first alignment hole arranged in the frame and a second alignment hole arranged in the mask plate. The first alignment hole is a through hole. The mask frame assembly effectively solves a problem in which liquid residuals in alignment holes of the frame interfere with alignment.
Claims7
A mask frame assembly comprising a frame and a mask plate fixed on the frame, wherein the mask frame assembly is provided with alignment marks, and the alignment marks comprise a first alignment hole which is arranged in the frame and a second alignment hole which is arranged in the mask plate;
- wherein the first alignment hole is a through hole;
- wherein the first alignment hole comprises a first segment, and the first segment has an inner wall which is not perpendicular with a plane in which the mask plate lies;
- wherein the first segment is a cylinder, and the cylinder has an axis which is not perpendicular with the plane in which the mask plate lies;
- and wherein an intersection angle between the axis of the cylinder of the first segment and the plane in which the mask plate lies is 30 degrees-60 degrees.
Dependencies are inferred from the claim text.