Reflective active variable lens and method of fabricating the same

A reflective active variable optical component comprising:

• an upper electrode;
• a lower electrode disposed in parallel to the upper electrode;
• a deformation part disposed between the upper electrode and the lower electrode;
• a reflective part disposed on the upper electrode;
• a support part disposed to surround the deformation part;
• and
• a central hole configured to expose an inner surface of the support part and a bottom surface of the lower electrode,
• wherein the deformation part and the support part are coupled to each other,
• the deformation part is expanded from an initial shape when an electric field is formed between the upper electrode and the lower electrode,
• the expanded deformation part is contracted when the electric field is removed and restored to the initial shape,
• the support part has a ring shape extending along an edge of the deformation part,
• the central hole has a diameter that gradually increases in a direction away from the deformation part, and
• the lower electrode extends along the inner surface of the support part to a bottom surface of the support part.

A reflective active variable optical component comprising:

• an upper electrode;
• a lower electrode disposed in parallel to the upper electrode;
• a deformation part disposed between the upper electrode and the lower electrode;
• a reflective part disposed on the upper electrode;
• a support part disposed to surround the deformation part;
• an upper support trench defined in an upper portion of the support part;
• and
• a packaging structure extending along an edge of the support part to cover an area disposed adjacent to the edge,
• wherein the deformation part and the support part are coupled to each other,
• the deformation part is expanded from an initial shape when an electric field is formed between the upper electrode and the lower electrode,
• the expanded deformation part is contracted when the electric field is removed and restored to the initial shape,
• the upper support trench comprises a region in which a top surface of the support part is recessed, and
• the packaging structure comprises a protruding portion that fills the upper support trench.