Substrate processing device, method for controlling substrate processing device, and storage medium storing a program

A substrate processing device for processing a substrate, comprising:

• a substrate mounting/dismounting device configured to support a substrate holding member,
• a multi-axis robot including a first hand for holding the substrate and configured to transfer the held substrate to the substrate mounting/dismounting device,
• at least one image sensor positioned above the first hand and configured to detect positions of two corners on at least one diagonal of a substrate held by the first hand when the substrate is transferred to a predetermined position by the first hand;
• at least one illuminating device located between the substrate holding member and the first hand and configured to illuminate the two corners of the substrate held by the first hand on an opposite side of the substrate at the predetermined position relative to the image sensor, the illuminating device is movable between an imaging position between the substrate and the substrate holding member, which position is opposed to the image sensor, and a retracted position where the illuminating device is retracted from the imaging position;
• and
• a control circuit configured to determine the position of the substrate on the basis of the positions of the two corners, which are detected by the image sensor,
• the control circuit being configured to calculate a center position and rotation angle of the substrate as the position of the substrate, and to correct the center position of the substrate to a predetermined center position after correcting the rotation angle of the substrate to a predetermined rotation angle when the calculated center position and rotation angle of the substrate differ from the predetermined center position and the predetermined rotation angle.

A method for controlling a substrate processing device for processing a substrate, comprising:

• changing at least either light quantity or wavelength of output light of at least one illuminating device in accordance with characteristics of the substrate;
• detecting positions of two corners on at least one diagonal of the substrate held by a hand of a multi-axis robot by using at least one image sensor located on an upper side of the hand of while illuminating the substrate from a lower side of the hand by using the illuminating device positioned between the hand holding the substrate and a substrate holding member, when the substrate is transferred to a predetermined position by the hand of the multi-axis robot;
• and
• determining a position of the substrate on the basis of the positions of the two corners, which are detected by the image sensor.

A non-transitory storage medium storing a program for causing a computer to execute a method for controlling a substrate processing device, the storage medium storing a program for causing a computer to execute:

• changing at least either light quantity or wavelength of output light of at least one illuminating device in accordance with characteristics of the substrate;
• detecting positions of two corners on at least one diagonal of the substrate held by a hand of a multi-axis robot by using at least one image sensor located on an upper side of the hand while illuminating the substrate from a lower side of the robot hand by using the illuminating device positioned between the hand holding the substrate and a substrate holding member, when the substrate is transferred to a predetermined position by the hand of the multi-axis robot;
• and
• determining a position of the substrate on the basis of the positions of the two corners, which are detected by the image sensor.

A method for controlling a substrate processing device for processing a substrate, comprising:

• moving at least one illuminating device to an imaging position between the substrate held by a hand of a multi-axis robot and a substrate holding member, which position is opposed to at least one image sensor,
• detecting positions of two corners on at least one diagonal of the substrate held by the hand by using the image sensor located on an upper side of the hand while illuminating the substrate from a lower side of the hand by using the illuminating device positioned between the hand holding the substrate and the substrate holding member, when the substrate is transferred to a predetermined position,
• calculating a center position and rotation angle of the substrate as a position of the substrate;
• correcting the center position of the substrate to a predetermined center position after correcting the rotation angle of the substrate to a predetermined rotation angle when the calculated center position and rotation angle of the substrate differ from the predetermined center position and the predetermined rotation angle;
• and
• moving the illuminating device to a retracted position where the illuminating device is retracted from the imaging position.

A non-transitory storage medium storing a program for causing a computer to execute a method for controlling a substrate processing device, the storage medium storing a program for causing a computer to execute:

• moving at least one illuminating device to an imaging position between the substrate held by a hand of a multi-axis robot and the substrate holding member, which position is opposed to at least one image sensor;
• detecting positions of two corners on at least one diagonal of the substrate held by the hand by using the image sensor located on an upper side of the hand while illuminating the substrate from a lower side of the hand by using the illuminating device positioned between the hand holding the substrate and the substrate holding member, when the substrate is transferred to a predetermined position;
• calculating a center position and rotation angle of the substrate as a position of the substrate;
• correcting the center position of the substrate to a predetermined center position after correcting the rotation angle of the substrate to a predetermined rotation angle when the calculated center position and rotation angle of the substrate differ from the predetermined center position and the predetermined rotation angle;
• and
• moving the illuminating device to a retracted position where the illuminating device is retracted from the imaging position.