Vertical vacuum channel transistor
AssigneeInternational Business Machines Corporation
InventorsInjo Ok, Choonghyun Lee, Soon-Cheon Seo, Seyoung Kim
Life of this patent
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Abstract
A vertical vacuum transistor with a sharp tip structure, and associated fabrication process, is provided that is compatible with current vertical CMOS fabrication processing. The resulting vertical vacuum channel transistor advantageously provides improved operational characteristics including a higher operating frequency, a higher power output, and a higher operating temperature while at the same time providing a higher density of vertical transistor devices during the manufacturing process.
Claims7
A vertical vacuum channel transistor, comprising:
- a sharp tip structure comprising two tip portions, wherein one tip portion of the two tip portions is an emitter of the vertical vacuum channel transistor and another tip portion of the two tip portions is a collector of the vertical vacuum channel transistor;
- a vacuum channel between the two tip portions;
- and
- a gate of the vertical vacuum channel transistor, wherein a metal contact for each of the emitter, the collector and the gate of the vertical vacuum channel transistor is formed in a respective trench for each of the emitter, the collector and the gate of the vertical vacuum channel transistor that each extend downward in a vertical direction from a common top surface, wherein the two tip portions are formed from a silicon germanium (SiGe) material, wherein the silicon germanium (SiGe) material is a portion of an inverted T-shaped fin structure, and further comprising:
- a bottom spacer formed on a horizontal surface of the inverted T-shaped fin structure;
- a high-K dielectric layer formed on sidewalls of the inverted T-shaped fin structure;
- and
- a metal gate layer formed on the high-K dielectric layer, wherein the high-K dielectric layer is also formed on a top surface of the bottom spacer.
A vertical vacuum channel transistor, comprising:
- a sharp tip structure comprising two tip portions, wherein one tip portion of the two tip portions is an emitter of the vertical vacuum channel transistor and another tip portion of the two tip portions is a collector of the vertical vacuum channel transistor;
- a vacuum channel between the two tip portions;
- and
- a gate of the vertical vacuum channel transistor, wherein the two tip portions are formed from a silicon germanium (SiGe) material, and wherein the one tip portion and the another tip portion are separated by the vacuum channel that is less than 150 nm in length, wherein the silicon germanium (SiGe) material is a portion of an inverted T-shaped fin structure, and further comprising:
- a bottom spacer formed on a horizontal surface of the inverted T-shaped fin structure;
- a high-K dielectric layer formed on sidewalls of the inverted T-shaped fin structure;
- and
- a metal gate layer formed on the high-K dielectric layer, wherein the high-K dielectric layer is also formed on a top surface of the bottom spacer.
Dependencies are inferred from the claim text.