Plating device
AssigneeYamamoto-MS Co., Ltd.
InventorsWataru Yamamoto, Kimiko Koiwa, Katsunori Akiyama, Masazumi Ishiguro, Yoshiaki Hoshino
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AssigneeYamamoto-MS Co., Ltd.
InventorsWataru Yamamoto, Kimiko Koiwa, Katsunori Akiyama, Masazumi Ishiguro, Yoshiaki Hoshino
Estimating the term…
A plating apparatus capable of preventing difference in an electrode potential between the pair of cathodes and a disturbance in a current distribution in Haring cell test and so on is provided. A plating apparatus (1) has an anode (12) and a pair of cathodes (13X) (13Y) which are provided in a plating bathtub (11); a plating power source (14) to supply an electric current between the anode (12) and the pair of cathodes (13X) (13Y); and a feedback circuit (21) to have an electrode potential of a first cathode (13X) equal to an electrode potential of a second cathode (13Y) while a summation of electric currents flowing through the pair of cathodes (13X) (13Y) is kept constant.
A plating apparatus comprising:
Dependencies are inferred from the claim text.