Ejection-material ejection apparatus and imprinting apparatus
AssigneeCanon Kabushiki Kaisha
InventorYuichi Iwasaki
Life of this patent
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Abstract
The internal space of a storing container is separated by a flexible membrane into a first storing space storing an ejection material and a second storing space storing an operating liquid. A change in electrical property of the flexible membrane resulting from entry of at least one of the ejection material and the operating liquid to the inside of the flexible membrane is detected.
Claims10
An ejection-material ejection apparatus comprising:
- an ejection head that ejects an ejection material which is electrically conductive;
- a storing container with an internal space separated by a flexible membrane into a first storing space storing the ejection material to be supplied to the ejection head, and a second storing space storing an operating liquid which is electrically conductive;
- a pressure controller that controls internal pressure of the second storing space;
- and
- a detector that detects a change in electrical conductivity between a pair of electrodes disposed to face each other inside the flexible membrane,
- wherein the detector detects a change in electrical property of the flexible membrane resulting from entry of at least one of the ejection material and the operating liquid to inside of the flexible membrane.
An imprinting apparatus that processes a substrate by transferring a pattern on a mold to an imprint material applied to the substrate, comprising an ejection-material ejection apparatus that ejects the imprint material as an ejection material to apply the imprint material to the substrate,
- wherein the ejection-material ejection apparatus includes:
- an ejection head that ejects the ejection material which is electrically conductive;
- a storing container with an internal space separated by a flexible membrane into a first storing space storing the ejection material to be supplied to the ejection head, and a second storing space storing an operating liquid which is electrically conductive;
- a pressure controller that controls internal pressure of the second storing space;
- and
- a detector that detects a change in electrical conductivity between a pair of electrodes disposed to face each other inside the flexible membrane,
- wherein the detector detects a change in electrical property of the flexible membrane resulting from entry of at least one of the ejection material and the operating liquid to inside of the flexible membrane.
Dependencies are inferred from the claim text.