BAW resonator based pressure sensor
AssigneeTexas Instruments Incorporated
InventorsBichoy Bahr, Baher S. Haroun, Benjamin Stassen Cook
Life of this patent
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Abstract
A pressure sensor apparatus is disclosed. The pressure sensor apparatus includes a bulk acoustic wave (BAW) die having a die interface side and a pressure contact side, a sensor BAW resonator and a reference BAW resonator disposed on the die interface side of the BAW die, a control circuit die coupled to the die interface side of the BAW die via an attachment layer, and an extended opening on the pressure contact side that extends into a depth of the BAW die and is generally aligned with the sensor BAW resonator, the extended opening being configured to translate an external pressure on the pressure contact side onto the sensor BAW resonator.
Claims29
A pressure sensor apparatus, comprising:
- a bulk acoustic wave (BAW) die having a die interface side and a pressure contact side, the BAW die including
- a sensor BAW resonator and a reference BAW resonator coupled to the die interface side;
- an attachment layer;
- a control circuit die coupled to the die interface side via the attachment layer;
- and
- the pressure contact side having an opening that extends into the BAW die toward the sensor BAW resonator, the opening configured to translate a pressure from the pressure contact side to the sensor BAW resonator.
A method of fabricating a pressure sensor, the method comprising:
- providing a bulk acoustic wave (BAW) die having a die interface side and a pressure contact side, the BAW die including a sensor BAW resonator and a reference BAW resonator coupled to different locations of the die interface side;
- coupling a control circuit die to the die interface side using an attachment layer;
- and
- etching an opening on the pressure contact side that extends into the BAW die toward the sensor BAW resonator, wherein the opening is configured to translate a pressure from the pressure contact side to the sensor BAW resonator.
A tactile sensing apparatus, comprising:
- a plurality of sensor bulk acoustic wave (BAW) resonators;
- a reference BAW resonator;
- a cap configured to accept a pressure;
- and
- a plurality of openings, each opening corresponding to a respective one of the plurality of sensor BAW resonators and configured to translate the pressure from a respective portion of the cap to the respective one of the plurality of sensor BAW resonators.
A pressure sensor apparatus, comprising:
- a bulk acoustic wave (BAW) die having opposite first and second sides, the BAW die including first and second BAW resonators coupled to the first side, and the second side having an opening extending into the BAW die toward the first BAW resonator;
- and
- a control circuit die coupled to the first side of the BAW die.
Dependencies are inferred from the claim text.