Method of manufacturing inductors in BEOL with particulate magnetic cores
AssigneeInternational Business Machines Corporation
InventorsChandrasekharan Kothandaraman, Eugene J. O'Sullivan, Naigang Wang
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Abstract
A method for forming an inductor device. The method comprises forming a trench within a central core region of a conductive coil formed within a dielectric material. The method further comprises forming a composite region within the trench. The composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed therein with the central core region to reduce eddy current loss and increase energy storage.
Claims20
A method for forming an inductor device, comprising:
- forming a conductive coil within a dielectric material;
- forming a trench within a central core region of the conductive coil;
- and
- forming a composite region within the trench, the composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed in the polymer matrix to reduce eddy current loss and increase energy storage, each of the plurality of particles having an electrically charged coating, the plurality of particles including different sizes with electrical charges corresponding to particle size, wherein the central core region has a plurality of particle densities of the particles with magnetic properties.
A method for forming an inductor device, comprising:
- forming a trench within a central core region of a conductive coil;
- and
- forming a composite region within the trench, the composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed in the polymer matrix to reduce eddy current loss and increase energy storage, each of the plurality of particles having an electrically charged coating, the plurality of particles including different sizes with electrical charges corresponding to particle size.
A method for forming an inductor device, comprising:
- forming a conductive coil within a dielectric material;
- forming a trench within a central core region of the conductive coil;
- dispersing, in a polymer matrix, a plurality of particles with magnetic properties to reduce eddy current loss and increase energy storage, each of the plurality of particles having an electrically charged coating, the plurality of particles including different sizes with electrical charges corresponding to particle size;
- and
- forming a composite region by depositing the polymer matrix within the trench.
Dependencies are inferred from the claim text.