Recipe creation device for use in semiconductor measurement device or semiconductor inspection device

A method for recipe creation, comprising:

• establishing, by an arithmetic processing device, measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device on the basis of design data for a semiconductor element;
• inputting, by an input device, pattern information included in the design data;
• accessing, by the arithmetic processing device, a database in which the measurement conditions or inspection conditions, and the inputted pattern information, are stored in associated form;
• selecting, by the arithmetic processing device, the measurement conditions or inspection conditions through a search using the inputted pattern information, and creating the recipe based on selected measurement conditions or inspection conditions and the inputted pattern information;
• and
• displaying, by a display device, recipe information of the recipe;
• wherein the arithmetic processing device controls the display device to display the selected measurement conditions or inspection conditions, and at least one of:
• a use frequency of the measurement conditions or the inspection conditions;
• and
• a use time of the measurement conditions or the inspection conditions,
• as information applied to the selected measurement conditions or inspection conditions.

A non-transitory computer-readable medium storing a program, which when executed by a computer, causes the computer to:

• establish measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device on the basis of design data for a semiconductor element;
• receive pattern information included in the design data;
• access a database in which the measurement conditions or inspection conditions, and the inputted pattern information, are stored in associated form;
• select the measurement conditions or inspection conditions through a search using the inputted pattern information, and create the recipe based on selected measurement conditions or inspection conditions and the inputted pattern information;
• and
• display recipe information of the recipe, the selected measurement conditions or inspection conditions, and at least one of:
• a use frequency of the measurement conditions or the inspection conditions;
• and
• a use time of the measurement conditions or the inspection conditions,
• as information applied to the selected measurement conditions or inspection conditions.