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US 10,982,811 B2Granted
Material, storage container using the material, valve attached to the storage container, method of storing ClF and method of using ClF storage container
AssigneeKanto Denka Kogyo Co., Ltd.
InventorsHiroki Takizawa, Sho Kikuchi, Yukinobu Shibusawa
Life of this patent
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Abstract
A material at least partly coated with a passive film of fluoride formed by contact with a gas containing ClF.
Claims10
A storage container
- characterized in that the storage container is made of a material, the material is at least partly coated with a passive film of fluoride formed by contact with a gas containing ClF;
- characterized in that the storage container has an inner surface coated with the passive film;
- and
- characterized in that the storage container has a valve attached thereto, the valve having
- a flow passage for the gas to flow through,
- a valve seat through which the flow passage passes, and
- a valve member brought into contact with or away from the valve seat to close or open the flow passage, wherein
- the flow passage and the portions of the valve seat and valve member which are to be exposed to a gas are coated with the passive film.
5 more elements
Dependencies are inferred from the claim text.