Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations
AssigneeGrenzebach Maschinenbau GmbH
InventorsJoerg Fiukowski, Gerd Kleideiter
Life of this patent
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Abstract
Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations with the following features: a) a pair of cathodes arranged in a common process chamber and consisting of a first cathode body and a second cathode body is supplied with direct current by means of a common power supply, wherein, before entering the process chamber, the direct current is converted into a series of pulses comprising alternating positive and negative pulses with interpulse periods in between, b) an arrangement for controlling the length of the individual pulses and the duration of the respective interpulse periods.
Claims14
A device for producing defined properties of gradient layers in a system of multilayered coatings on a substrate in a sputtering process, comprising:
- a cathode pair arranged in a common processing chamber, consisting of a first cathode body and a second cathode body, which is supplied with direct current by means of a common power supply, wherein the direct current is converted before entry into the processing chamber into a pulse sequence having alternating positive and negative pulses with interposed pulse pauses,
- an arrangement for independently controlling a length of the individual pulses and a duration of the respective pulse pauses;
- an arrangement for adjusting the first and second cathode bodies in such a manner that a common deposition region results on the substrate, and
- a common process gas system, which supplies a basic supply of the process gas, wherein a separate symmetrically arranged segmented process gas system is associated with each of the first and second cathode bodies,
- wherein the device comprises a machine-readable carrier having the program code of a computer program that, when executed, causes the common power supply to supply a positive pulse to the first cathode body and a negative pulse to the second cathode body, the positive pulse and the negative pulse being supplied in one pulse period to the respective first cathode and second cathode.
A method for producing defined properties of gradient layers in a system of multilayer coatings in a sputtering process, comprising:
- replacing a direct-current or mean frequency generator in the sputtering installation with a bipolar pulse generator,
- connecting an output supplying a positive pulse from a bipolar pulse generator to a first cathode corresponding to a first coating task,
- connecting an output supplying a negative pulse from the bipolar pulse generator to a second cathode corresponding to a second coating task,
- generating the positive and negative pulses in the bipolar pulse generator, and
- supplying the positive pulse to the first cathode and the negative pulse to the second cathode, the positive pulse and the negative pulse being supplied in one pulse period to the respective first cathode and second cathode,
- wherein a duration of the respective pulses is carried out in accordance with the first and second coating tasks to produce a gradient layer of the multilayer coating on a substrate,
- wherein the duration of the positive and negative pulses are independently varied, and
- wherein each of the positive and negative pulses includes one or more breaks between individual durations of the pulses that interrupt the sputtering process.
Dependencies are inferred from the claim text.