Mask plate assembly capable of preventing wrinkle and assembly method thereof
AssigneesBoe Technology Group Co., Ltd., Ordos Yuansheng Optoelectronics Co., Ltd.
InventorsZhiming Lin, Zhen Wang
Life of this patent
Estimating the term…
Abstract
Disclosed are a mask plate and an assembly method thereof. The mask plate includes a covering bar; a support bar; and at least one mask sheet, the mask sheet includes one mask area, a mask pattern is distributed in the entire mask area; and the covering bar and the support bar are intersected with each other to divide the mask area into a plurality of mask units. Thus, the mask sheet will not produce wrinkle in different degrees upon being stretched, in this way, the accuracy of the deposited or evaporated pattern can be improved, and the yield of the mask plate can be improved as well.
Claims15
A mask plate assembly, comprising:
- a covering bar;
- a support bar;
- and
- at least one mask sheet,
- wherein the mask sheet comprises one mask area, a mask pattern is distributed in an entire area of the mask area;
- and the covering bar and the support bar are intersected with each other to divide the mask area into a plurality of mask units,
- wherein the mask pattern on a plane of the mask sheet and an orthographic projection of the support bar on the plane of the mask sheet have an overlapping region, and the mask pattern in the overlapping region and the mask pattern in the plurality of mask units have a same structure,
- the covering bar, the support bar, and the at least one mask sheet are independent components,
- the mask plate assembly further comprises a frame and an alignment bar, the mask sheet is partially overlapped with the covering bar, so as to completely shield an opening of the frame, the alignment bar is fixed on the frame and configured to align the covering bar or the support bar, the support bar is disposed in a recess of the alignment bar, the frame and the alignment bar are independent components, the frame, the alignment bar, the support bar, and the covering bar are located on a same side of the mask sheet.
Dependencies are inferred from the claim text.