Chemical synthesis device
AssigneeToray Engineering Co., Ltd.
InventorsTsukasa Niwa, Chisa Inaka
Life of this patent
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Abstract
A chemical synthesis device includes a reaction vessel, a waste liquid tank and an intermediate container. A chemical is supplied to the reaction vessel. The waste liquid tank is configured to hold waste liquid discharged from the reaction vessel. The intermediate container has a smaller capacity than the waste liquid tank. The intermediate container is provided between the reaction vessel and the waste liquid tank, via a waste liquid pipe. The pressure of the intermediate container is adjusted to adjust the flow supplied to the reaction vessel and the flow discharged from the reaction vessel.
Claims14
A chemical synthesis device, comprising:
- a reaction vessel to which a chemical is supplied;
- a waste liquid tank configured to hold waste liquid discharged from the reaction vessel;
- and
- an intermediate container having a smaller capacity than the waste liquid tank, the intermediate container being provided between the reaction vessel and the waste liquid tank, via a waste liquid pipe, and the pressure of the intermediate container being adjusted to adjust the flow supplied to the reaction vessel and the flow discharged from the reaction vessel.
Dependencies are inferred from the claim text.