US 10,978,315 B2 · Vacuum evacuation system

Abstract

The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (1). The vacuum evacuation system includes a plurality of first vacuum pumps (5) coupled to the plurality of process chambers (1) respectively, a collecting pipe (7) coupled to the plurality of first vacuum pumps (5), and a second vacuum pump (8) coupled to the collecting pipe (7).

Claims9

Dependent claims

A vacuum evacuation system for evacuating a gas from a plurality of process chambers, comprising:

a plurality of first vacuum pumps which can be coupled to the plurality of process chambers, respectively;
a collecting pipe coupled to the plurality of first vacuum pumps;
a second vacuum pump coupled to the collecting pipe, the plurality of first vacuum pumps and the second vacuum pump being disposed in a first room;
and
a third vacuum pump coupled to the second vacuum pump, the third vacuum pump being disposed in a second room which is separated from the first room.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

15/313,990Filed 28 May 2015

Priority

JP JP2014-11248030 May 2014

Published

US 2017/0200622 A113 Jul 2017

Granted

13 Apr 2021

Term ends

Not estimatedThe source records don’t support an estimate.

Classification20 codes

H10P 72/0402
Apparatus for manufacture or treatment: apparatus for fluid treatment
C23C 14/22
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material: characterised by the process of coating
C23C 16/4412
Characterised by the method of coating: details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
C23C 16/52
Characterised by the method of coating: controlling or regulating the coating process

Vacuum evacuation system

Life of this patent

Vacuum evacuation system

Life of this patent

Abstract

Claims9