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US 10,976,273 B2Granted
X-ray spectrometer system
AssigneeSigray, Inc.
InventorsWenbing Yun, Srivatsan Seshadri, Janos Kirz, Sylvia Jia Yun Lewis
Life of this patent
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Abstract
An x-ray spectrometer system includes an x-ray source, an x-ray optical system, a mount, and an x-ray spectrometer. The x-ray optical system is configured to receive, focus, and spectrally filter x-rays from the x-ray source to form an x-ray beam having a spectrum that is attenuated in an energy range above a predetermined energy and having a focus at a predetermined focal plane.
Claims23
An x-ray spectrometry system comprising:
- an x-ray source configured to generate x-rays having a first spectrum;
- an x-ray optical system configured to receive, focus, and spectrally filter the x-rays to form an x-ray beam having a second spectrum that is attenuated, as compared to the first spectrum, in an energy range above a predetermined energy, the x-ray beam having a focus at a predetermined focal plane;
- a mount configured to hold a sample in a path of the x-ray beam from the x-ray optical system;
- and
- a x-ray spectrometer that receives at least some of the x-rays from the sample and analyzes the received x-rays, wherein the at least some of the x-rays from the sample comprise x-rays of the x-ray beam that are transmitted through the sample.
2 more elements
A method for x-ray spectroscopy, the method comprising:
- receiving x-rays having a first spectrum;
- focusing and spectrally filtering the received x-rays to form an x-ray beam having a second spectrum, the second spectrum attenuated, as compared to the first spectrum, in an energy range above a predetermined energy, the x-ray beam having a focus at a predetermined focal plane;
- irradiating a sample with at least some of the x-rays of the x-ray beam;
- and
- using a wavelength dispersive element to analyze x-rays from the sample comprising x-rays of the x-ray beam that are transmitted through the sample.
2 more elements
Dependencies are inferred from the claim text.