Charged particle beam device

A charged particle beam device comprising:

• a charged particle source;
• an extraction electrode configured to extract a charged particle from the charged particle source;
• an extraction-electrode power source configured to apply a voltage to the extraction electrode;
• an acceleration electrode configured to accelerate the charged particle;
• an acceleration power source configured to apply a voltage to the acceleration electrode;
• a diode and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source;
• and
• a capacitor connected between the middle stage and output of the acceleration power source.

A charged particle beam device comprising:

• a charged particle source;
• an extraction electrode configured to extract a charged particle from the charged particle source;
• an extraction-electrode power source configured to apply a voltage to the extraction electrode;
• an acceleration electrode configured to accelerate the charged particle;
• an acceleration power source configured to apply a voltage to the acceleration electrode;
• a diode and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source;
• and
• a power source control unit configured to control the acceleration power source and the extraction-electrode power source;
• an extraction-electrode power source node switch configured to disconnect the extraction-electrode power source from a circuit;
• and
• a falling detection unit configured to detect a falling of a voltage of the extraction-electrode power source, wherein
• the falling detection unit turns off the extraction-electrode power source node switch when the falling of the voltage of the extraction-electrode power source is detected.

A charged particle beam device comprising:

• a charged particle source;
• an extraction electrode configured to extract a charged particle from the charged particle source;
• an extraction-electrode power source configured to apply a voltage to the extraction electrode;
• an acceleration electrode configured to accelerate the charged particle;
• an acceleration power source configured to apply a voltage to the acceleration electrode;
• and
• a switch and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source.