Controlling multiple plasma processes

A plasma processing system comprising:

• at least two independent plasma processing chambers;
• and
• a power converter configured to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to the plasma processing chambers, the power converter comprising:
• a power input port for connection to an electrical power delivering grid;
• at least two power output ports each for connection to a respective one of the plasma processing chambers;
• and
• a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using at least one control parameter selected from a list comprising power, voltage, current, excitation frequency, and protection threshold,
• wherein the controller is configured to:
• obtain a full set of desired values for the at least one controller parameter for the power output ports,
• determine whether the power converter is capable of delivering a respective desired value for the at least one control parameter to each of the power output ports, and
• in response to determining that the power converter is capable of delivering the respective desired values for the at least one control parameter to the power output ports, calculate a sequence of pulses of power delivery to the power output ports to supply the bipolar output power to plasma processes in the plasma processing chambers.

A method of controlling multiple plasma processes in multiple plasma processing chambers by a controller in a power converter, the method comprising:

• converting an electrical input power into a bipolar output power;
• controlling the power converter to deliver the bipolar output power to at least two power output ports, using at least one control parameter selected from a list comprising power, voltage, current, excitation frequency, and protection threshold, the controlling comprising:
• obtaining a full set of desired values for the at least one control parameter for the power output ports;
• determining whether the power converter is capable of delivering a respective desired value of the at least one control parameter to each of the power output ports;
• and
• in response to determining that the power converter is capable of delivering the respective desired values of the at least one control parameter to the power output ports, calculating a sequence of pulses of power delivery to the power output ports to supply the bipolar output power to plasma processes in the plasma processing chambers;
• and
• outputting the sequence of pulses of power from the power output ports to the plasma processing chambers.