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US 10,971,323 B1Granted
Semiconductor X-ray target
AssigneeExcillum AB
InventorsBjörn Hansson, Andrii Sofiienko, Ulf Lundström
Life of this patent
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Abstract
A solid X-ray target for generating X-ray radiation is disclosed. The X-ray target includes at least one material selected from a list including trivalent elements; and at least one material selected from a list including pentavalent elements, wherein a first one of the materials is capable of generating the X-ray radiation upon interaction with an electron beam, and a second one of the materials forms a compound with the first one of the materials. An X-ray source including such an X-ray target and an electron source is also disclosed.
Claims11
An X-ray source, comprising:
- an X-ray target;
- an electron source operable to generate an electron beam interacting with the X-ray target to generate X-ray radiation with an energy within the range 9 to 12 key;
- wherein the X-ray target comprises:
- a first element selected from a list consisting of trivalent elements;
- a second element selected from a list consisting of pentavalent elements forming a compound with said first element;
- a first region including the compound formed of the first and second material;
- and
- a second region supporting the first region;
- wherein the first region generates X-ray radiation upon interaction with the electron beam, and heat conduction between the first and second region is dominantly phonon heat conduction.
6 more elements
Dependencies are inferred from the claim text.