MEMS device with stiction recover and methods

A device comprising:

• a substrate comprising a die and a plurality of side-walls disposed upon the die;
• a proof-mass coupled to the substrate comprising sensing regions, wherein the proof-mass is configured to be displaced within a first plane that is parallel to the die, wherein a first portion of the proof-mass is configured to contact at least a side-wall from the plurality of side-walls, wherein the first portion of the proof-mass is configured to adhere to the side-wall as a result of stiction forces;
• a driving circuit configured to provide a driving voltage in response to a driving signal indicating that the proof-mass is adhered to the side-wall;
• and
• an actuator coupled to the driving circuit, wherein the actuator is configured to receive the driving voltage, wherein the actuator is configured to extend, to contact and to physically push a second portion of the proof mass within the first plane in a direction away from the side-wall in response to the driving voltage, wherein a force of the push exceeds the stiction forces, and wherein the first portion of the proof-mass is immediately adjacent to the second portion of the proof-mass.