Combined wafer production method with a receiving layer having holes
AssigneeSiltectra GmbH
InventorsJan Richter, Christian Beyer, Anas Ajaj
Life of this patent
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AssigneeSiltectra GmbH
InventorsJan Richter, Christian Beyer, Anas Ajaj
Estimating the term…
A method for producing solid layers includes: providing a solid for separating at least one solid layer; fixing an accommodating layer for holding the solid layer on the solid, wherein the accommodating layer has a multiplicity of holes for conducting a liquid, wherein the accommodating layer is fixed on the solid by means of a connecting layer; and thermal loading of the accommodating layer for mechanical generation of stresses in the solid. A crack in the solid propagates along a detachment plane due to the stresses. The solid layer is separated from the solid by means of the crack. The accommodating layer includes at least one polymer material, and the polymer material undergoes a glass transition at a temperature lower than 0° C.
A method for producing solid layers, comprising:
Dependencies are inferred from the claim text.