Coating apparatus and coating method

A coating apparatus comprising:

• an application head opposed to a coating surface of a target with a predetermined distance, and configured to form a meniscus pillar of a coating material between the application head and the coating surface;
• a first moving device configured to move the application head relative to the target along the coating surface;
• a second moving device configured to move the application head relative to the target in a direction in which the coating surface and the application head move away from each other and in a direction in which the coating surface and the application head move toward each other;
• a feeding device configured to feed the coating material between the application head and the coating surface of the target;
• a suction device that includes a suction portion independent of the application head and configured to suck the coating material;
• a detection device configured to detect the meniscus pillar between the application head and the coating surface;
• a third moving device configured to move the suction device to the meniscus pillar;
• and
• a control device configured to move, by controlling the second moving device, the application head and the coating surface relative to each other in a direction in which the application head and the coating surface move away from each other, after the coating material is applied to the coating surface, and to move, by controlling the third moving device, the suction device to the meniscus pillar detected by the detection device,
• wherein a distance between the application head and the coating surface is made greater than the predetermined distance, and the coating material is sucked from the meniscus pillar by the suction portion of the suction device,
• wherein when the application head is moved away from the coating surface and the meniscus pillar is formed, a distal end of the suction portion is opposed to the meniscus pillar to suck part of the coating material of the meniscus pillar,
• wherein the third moving device moves the suction device in a width direction of the application head and in a direction perpendicular to the width direction,
• wherein the control device is configured to control the detection device,
• wherein the detection device is configured to detect position information of the meniscus pillar and send the position information to the control device, and
• wherein the control device is configured to move, based on the position information of the meniscus pillar detected by the detection device, the suction portion of the suction device to a position for sucking the coating material of the meniscus pillar.