Method for providing hermetic electrical feedthrough
AssigneeSecond Sight Medical Products, Inc.
InventorsJerry Ok, Honggang Jiang
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Abstract
This invention provides methods for the processing of platinum metallized high temperature co-fired ceramic (HTCC) components with minimum deleterious reactions between platinum and the glass constituents of the ceramic-glass body. The process comprises co-firing a multilayer laminate green ceramic-glass body with via structures filled with a platinum powder-based material in a reducing atmosphere with a specified level of oxygen partial pressure. The oxygen partial pressure should be maintained above a minimum threshold value for a given temperature level.
Claims10
A method of fabricating a hermetic electrical feedthrough, the method comprising:
- providing a ceramic sheet, and having an upper surface and a lower surface, wherein said sheet includes silicon dioxide;
- forming at least one via hole in said sheet extending from said upper surface to said lower surface;
- inserting a conductive thickfilm paste, including platinum, into said via hole;
- laminating said sheet with said conductive thick film paste in said via hole between an upper ceramic sheet, and a lower ceramic sheet, to form a laminated substrate wherein said via hole is encased in ceramic;
- selecting an oxygen controlled environment, between 10−38 and 10−3 atmospheres of oxygen partial pressure, by introduction of other gasses selected from the group consisting of C02/CO, C02/NH3, C02/H2, H20/H2, H20/NH3, H20/CO, Nitrogen, or Argon, to balance platinum oxidation and silicon dioxide decomposition of said laminated substrate;
- firing said laminated substrate in said oxygen controlled environment to a temperature to sinter said laminated substrate to form a single sintered structure and cause said conductive thick film paste in said via hole to form a metallized via, including platinum in contact with ceramic, and cause said laminated substrate to form a fired laminated substrate and a hermetic seal around said metallized via;
- and
- removing said upper sheet material and said lower sheet material by lapping or grinding, to expose an upper and a lower surface of said metallized via.
Dependencies are inferred from the claim text.