Ceramic circuit board and semiconductor module
AssigneesKabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.
InventorsTakayuki Naba, Hiromasa Kato, Keiichi Yano
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Abstract
A ceramic circuit board comprises: a ceramic substrate with a 1.0 mm thickness or less including a first surface and a second surface, the first surface including a first area and a second area; a first metal plate joined to the first area; and a second metal plate joined to the second surface. The second area has a first waviness profile along a first side of the first surface, the first waviness profile having one extreme value or less. The second area has a second waviness profile along a second side of the first surface, the second waviness profile has not less than two nor more than three extreme values.
Claims17
A ceramic circuit board comprising:
- a ceramic substrate with a 1.0 mm thickness or less, the substrate including a first surface and a second surface, the first surface including a first area and a second area;
- a first metal plate joined to the first area with a first joining layer therebetween;
- and
- a second metal plate joined to the second surface with a second joining layer therebetween,
- wherein the first surface extends along a first direction and a second direction across the first direction,
- wherein the second area has a first waviness profile along a first side in the first direction of the first surface, the first waviness profile having one extreme value or less,
- wherein the second area has a second waviness profile along a second side in the second direction of the first surface, the second waviness profile having not less than two nor more than three extreme values,
- wherein the first joining layer has a first protrusion provided on the first surface and extending from a first interface between the first joining layer and the first metal plate, the first protrusion has a length of 10 μm or more and 100 μm or less, and the first interface and a side surface of the first metal plate define a first angle of 80 degrees or less therebetween, and
- wherein the second joining layer has a second protrusion provided on the second surface and extending from a second interface between the second joining layer and the second metal plate, the second protrusion has a length of 10 μm or more and 100 μm or less, and the second interface and a side surface of the second metal plate define a second angle of 80 degrees or less therebetween.
Dependencies are inferred from the claim text.