Acoustic resonator filter package

An acoustic resonator filter package comprising:

• an acoustic resonator comprising a piezoelectric layer, a first electrode disposed on a first surface of the piezoelectric layer, and a second electrode disposed on a second surface, of the piezoelectric layer;
• a first substrate having an upper surface on which the acoustic resonator is disposed;
• a filter spaced apart from the acoustic resonator in an upward direction;
• a second substrate having a lower surface on which the filter is disposed;
• and
• a connection member surrounding an accommodation space between the first substrate and the second substrate, and connecting the first substrate and the second substrate to each other,
• wherein the second substrate comprises a cavity in which the filter is disposed, and
• an area of a cross-section of the cavity taken along a first plane parallel to the upper surface of the first substrate is smaller than an area of a cross-section of the accommodation space surrounded by the connection,
• wherein the acoustic resonator filter package further comprises:
• a conductive pillar disposed on the upper surface of the first substrate;
• and
• a cavity terminal disposed in the cavity and electrically connecting the filter to the conductive pillar.

An acoustic resonator filter package comprising:

• a first substrate having a first surface;
• a second substrate having a first surface, the first surface of the second substrate facing the first surface of the first substrate;
• an acoustic resonator disposed on the first surface of the first substrate, the acoustic resonator comprising a piezoelectric layer;
• a filter disposed on the first surface of the second substrate;
• a coupling structure coupling the first substrate and the second substrate to each other so that the filter is spaced apart from the acoustic resonator;
• and
• a conductive pillar electrically connecting the filter to the first substrate,
• wherein the coupling structure comprises:
• a first coupling member connected to the first substrate;
• a second coupling member connected to the second substrate;
• and
• a connection member connecting the first coupling member and the second coupling member to each other, and
• the first coupling member and the second coupling member are made of a material having a lower melting point than a material of which the first substrate is made, a material of which the second substrate is made, and a material of which the connection member is made,
• wherein the second substrate comprises a cavity opening toward the first surface of the first substrate and having the filter disposed therein, and
• the acoustic resonator filter package further comprises a cavity terminal disposed in the cavity and electrically connecting the filter to the conductive pillar.