Repulsive-force electrostatic actuator

A repulsive-force electrostatic actuator, comprising:

• a first actuator layer comprising:
• a first substrate of a first dielectric material having a first transverse thickness and two opposing surfaces,
• a first electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said first substrate, and
• a second electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said first substrate so as to be on an opposing side with respect to said first electrode pattern,
• wherein said first and second electrode patterns are substantially a same pattern, and
• wherein said first and second electrode patterns are substantially aligned with each other in a direction of said first transverse thickness on said two opposing surfaces of said first substrate;
• a second actuator layer spaced apart from said first actuator layer with at least one of a vacuum, air, a gas or a dielectric material therebetween, said second actuator layer comprising:
• a second substrate of a second dielectric material having a second transverse thickness and two opposing surfaces,
• a third electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said second substrate, and
• a fourth electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said second substrate so as to be on an opposing side with respect to said third electrode pattern,
• wherein said third and fourth electrode patterns are substantially the same pattern of said first and second electrode patterns, and
• wherein said third and fourth electrode patterns are substantially aligned with each other in a direction of said second transverse thickness on said two opposing surfaces of said second substrate;
• at least one voltage source connected to said first, second, third and fourth electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said first electrode pattern is at an opposite voltage relative to said second electrode pattern, said third electrode pattern is at an opposite voltage relative to said fourth electrode pattern, and said first and second actuator layers are arranged to have a repulsive electrostatic force therebetween during operation;
• and
• an actuator frame connected to said first and second actuator layers such that at least a portion of at least one of said first and second actuator layers is movable due to an applied voltage to effect motion to an object at least one of attached to or in mechanical connection to said repulsive-force electrostatic actuator when in operation.