Repulsive-attractive-force electrostatic actuator

A multi-substrate repulsive-attractive-force electrostatic actuator, comprising:

• a first actuator layer comprising:
• a first substrate of a first dielectric material having a transverse thickness and two opposing surfaces,
• a first electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said first substrate, and
• a second electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said first substrate so as to be on an opposing side with respect to said first electrode pattern,
• wherein said first and second electrode patterns are substantially aligned with each other in a direction of said transverse thickness on said two opposing surfaces of said first substrate,
• a second substrate of a second dielectric material having a transverse thickness and two opposing surfaces, at least one of attached to or formed on the other one of said two opposing surfaces of said second electrode pattern so as to be on an opposing side with respect to said first substrate, and
• a third electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said second substrate so as to be on an opposing side with respect to said second electrode pattern,
• a first voltage source connected to said first and second electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said first electrode pattern is at a relative voltage of V1 to said second electrode pattern, and
• a second voltage source connected to said second and third electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said second electrode pattern is at a relative voltage of V2 to said third electrode pattern;
• a second actuator layer spaced apart from said first actuator layer with at least one of a vacuum, air, a gas or a dielectric material therebetween, said second actuator layer comprising:
• a third substrate of a third dielectric material having a transverse thickness and two opposing surfaces,
• a fourth electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said third substrate,
• a fifth electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said third substrate so as to be on an opposing side with respect to said fourth electrode pattern,
• wherein said fourth and fifth electrode patterns are substantially aligned with each other in a direction of said transverse thickness on said two opposing surfaces of said third substrate,
• a fourth substrate of a fourth dielectric material having a transverse thickness and two opposing surfaces, at least one of attached to or formed on the other one of said two opposing surfaces of said fifth electrode pattern so as to be on an opposing side with respect to said third substrate, and
• a sixth electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said fourth substrate so as to be on an opposing side with respect to said fifth electrode pattern;
• a third voltage source connected to said fourth and fifth electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said fourth electrode pattern is at a relative voltage of V3 to said fifth electrode pattern;
• a fourth voltage source connected to said fifth and sixth electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said fifth electrode pattern is at a relative voltage of V4 to said sixth electrode pattern;
• wherein said applied relative voltages V1, V2, V3, and V4 are selectable to provide one of a selected repulsive force or a selected attractive force between said first and second actuator layers.