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US 10,951,009 B2Granted
Tunable VCSEL polarization control through dissimilar die bonding
AssigneeExcelitas Technologies Corp.
InventorsBartley C. Johnson, Mark R. Malonson, Walid A. Atia, Mark E. Kuznetsov, James W. Getz, Peter S. Whitney
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Abstract
A design and method for introducing asymmetric crystal strain to control polarization in a tunable VCSEL, either optically or electrically pumped. The invention is especially relevant to wafer- or die-bonded tunable VCSELs. Then, mechanical stress is applied to the half VCSEL device by asymmetric arrangement of metal bond pads.
Claims13
A VCSEL, comprising:
- a membrane device including an optical membrane and a mirror dot on the optical membrane;
- a half VCSEL device including a quantum well structure and a distributed Bragg reflector mirror, in which during operation light resonates between the distributed Bragg reflector mirror and membrane mirror dot and electrostatic deflection of the optical membrane is used to tune a wavelength of the VCSEL;
- wherein asymmetric mechanical stress is applied to the half VCSEL device by the membrane device to control a polarization of light generated by the VCSEL.
A VCSEL, comprising:
- a membrane device including an optical membrane, a mirror dot on the optical membrane;
- a half VCSEL device including a quantum well structure and a distributed Bragg reflector mirror, in which during operation light resonates between the distributed Bragg reflector mirror and membrane mirror dot and electrostatic deflection of the optical membrane is used to tune a wavelength of the VCSEL;
- and
- four bond pads attaching the membrane device to the half VCSEL device, wherein a distance between the four bond pads is different between two axes of a plane of the membrane device and the half VCSEL device to apply asymmetric mechanical stress to the half VCSEL device.
1 more element
A method for fabricating a VCSEL, the method comprising:
- fabricating a membrane device including an optical membrane and a mirror dot on the optical membrane;
- fabricating a half VCSEL device;
- bonding the membrane device to the half VCSEL device to induce asymmetrical mechanical stress in the half VCSEL device by the membrane device to control a polarization of light generated by the VCSEL.
Dependencies are inferred from the claim text.