Apparatuses including electrodes having a conductive barrier material and methods of forming same
AssigneeMicron Technology, Inc.
InventorsSwapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Abstract
Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.
Claims20
An apparatus, comprising:
- a first chalcogenide structure;
- a second chalcogenide structure stacked together with the first chalcogenide structure;
- a first electrode coupled to the first chalcogenide structure;
- a second electrode coupled to the second chalcogenide structure;
- and
- an electrically conductive barrier material disposed between the first and second electrodes, wherein the electrically conductive barrier material is thicker than a combined thickness of the first and second electrodes.
A memory cell, comprising:
- a phase change device configured to store one or more bits of data and coupled to a first electrode;
- an electrically conductive barrier material coupled to the first electrode and a second electrode, wherein the electrically conductive barrier material is thicker than 50 {dot over (a)}ngströms;
- and
- a switch integrally formed in the memory cell with the phase change device, the first electrode, the electrically conductive barrier material, and the second electrode.
An apparatus, comprising:
- a phase change device configured to store one or more bits of data and coupled to a first electrode;
- an electrically conductive barrier material coupled to the first electrode and a second electrode;
- and
- a switch integrally formed with the phase change device, the first electrode, the electrically conductive barrier material, and the second electrode, wherein the switch is coupled to the second electrode.
Dependencies are inferred from the claim text.