Method of manufacturing piezoelectric thin film and piezoelectric sensor manufactured using piezoelectric thin film

A piezoelectric sensor, comprising:

• a substrate;
• a lower electrode formed on the substrate;
• a two-dimensional perovskite nanosheet seed layer formed on the lower electrode;
• a ceramic piezoelectric thin film formed on the two-dimensional perovskite nanosheet seed layer;
• and
• an upper electrode formed on the ceramic piezoelectric thin film,
• wherein each of the two-dimensional perovskite nanosheet seed layer and the ceramic piezoelectric thin film has a crystal structure, and
• wherein the two-dimensional perovskite nanosheet seed layer is a layer of a material selected from the group consisting of at least one selected from the group consisting of MnO2, Mn3O7, LaNb2O7, La0.90Eu0.05Nb2O7, Eu0.56Ta2O7, SrTa2O7, Bi2SrTa2O9, Ca2Nb3O10, Sr2Nb3O10, NaCaTa3O10, CaLaNb2TiO10, La2Ti2NbO10, Ba5Ta4O15, W2O7, RuO2.1, Cs4W11O36, TiNbO5, Ti2NbO7, and TiTaO5.