Manufacturing method for electrode of high-temperature piezoelectric element

Abstract

A manufacturing method for an electrode of a high-temperature piezoelectric element, comprises: coating traditional conductive slurry on surfaces of a molded piezoelectric material (1); then polarizing the piezoelectric material (1); and then removing the coating of conductive slurry (2) on the surfaces there of, and connecting the piezoelectric material to outside electrode lead wires (3) to output a signal generated by piezoelectric effect thereof. A structure of a high-temperature piezoelectric element, comprises polarized piezoelectric material (1), wherein the coating of metallic conductive slurry (2) is removed from the surfaces of the polarized piezoelectric material (1) and the surfaces of the polarized piezoelectric material (1) is connected to electrode lead wires (3) to output a signal generated by piezoelectric effect thereof. By removing the traditional coating of slurry for electrode, it is avoided that the output resistance of the piezoelectric element is reduced because of the high temperature diffusion of electrode material at a high temperature, and the thermal performance of the piezoelectric element is improved. By adding diamond or graphite coating as electrode, the sensitivity of outputting charges of the piezoelectric element is improved.

Dependencies are inferred from the claim text.