Transducer and inspection device
AssigneeKabushiki Kaisha Toshiba
InventorsKazuhiro Itsumi, Tomio Ono
Life of this patent
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AssigneeKabushiki Kaisha Toshiba
InventorsKazuhiro Itsumi, Tomio Ono
Estimating the term…
According to one embodiment, a transducer includes first structure sections and second structure sections. The first structure sections are spaced from each other in a first direction. Part of each of the first structure sections is fixed. The each of the first structure sections includes a first membrane part, a first piezoelectric part, a first conductive part, and a first electrode. The second structure sections are spaced from each other in the first direction. Part of each of the second structure sections is fixed. The each of the second structure sections includes a second membrane part, a second piezoelectric part, a second conductive part, and a second electrode. The second structure sections are spaced from the first structure sections in the first direction. Pitch along the first direction of the second structure sections is shorter than pitch along the first direction of the first structure sections.
A transducer comprising:
An inspection device comprising:
Dependencies are inferred from the claim text.