Solid-state imaging device, method of manufacturing the same, and electronic device

A method of manufacturing comprising a step of:

• forming a light detecting device comprising a plurality of pixels arranged in columns and rows, wherein each pixel includes:
• a photoelectric conversion region in a semiconductor substrate;
• and
• a moth-eye structure on a surface of a light incident side of the semiconductor substrate and over the photoelectric conversion region, the moth-eye structure including:
• a plurality of first portions having respective first heights;
• and
• a second portion having a second height different than the first heights, wherein the second portion is disposed between two of the first portions in a cross-sectional view wherein the second height is larger than the first heights.

An electronic device comprising a light detecting device comprising a plurality of pixels arranged in columns and rows, wherein each pixel includes:

• a plurality of pixels arranged in columns and rows, each pixel including:
• a photoelectric conversion region in a semiconductor substrate;
• and
• a moth-eye structure on a surface of a light incident side of the semiconductor substrate and over the photoelectric conversion region, the moth-eye structure including:
• a plurality of first portions having respective first heights;
• and
• a second portion having a second height different than the first heights, wherein the second portion is disposed between two of the first portions in a cross-sectional view wherein the second height is larger than the first heights.