Electrical testing method of interposer
AssigneeSiliconware Precision Industries Co., Ltd.
InventorsLu-Yi Chen, Chi-Hsin Chiu, Shih-Kuang Chiu
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Abstract
An interposer is provided which includes: a substrate having a first surface with a plurality of first conductive pads and a second surface opposite to the first surface, the second surface having a plurality of second conductive pads; a plurality of conductive through holes penetrating the first and second surfaces of the substrate and electrically connecting the first and second conductive pads; and a first removable electrical connection structure formed on the first surface and electrically connecting a portion of the first conductive pads so as to facilitate electrical testing of the interposer.
Claims12
An electrical testing method of an interposer, comprising the steps of:
- providing an interposer, the interposer comprising:
- a substrate having a first surface with a plurality of first conductive pads and a second surface opposite to the first surface, the second surface having a plurality of second conductive pads;
- a plurality of conductive through holes penetrating the first and second surfaces of the substrate and electrically connecting the first and second conductive pads;
- and
- a first removable electrical connection structure formed on the first surface and electrically connecting a portion of the first conductive pads,
- wherein the first removable electrical connection structure is a metal layer or a wiring layer formed on the first conductive pads and the first surface, and
- wherein the first conductive pads further have a first Under bump metallurgy (UBM) layer formed thereon and the second conductive pads further have a second UBM layer formed thereon, such that the first removable electrical connection structure is interposed between the first conductive pads and the first UBM layer, and a second removable electrical connection structure is interposed between the second conductive pads and the second UBM layer;
- electrically connecting a plurality of probes to the interposer to test the interposer;
- and removing the first removable electrical connection structure.
Dependencies are inferred from the claim text.