US 10,950,482 B2 · Device for supporting substrate, apparatus for manufacturing display panel, and method for supporting substrate

Abstract

A device for supporting a substrate, an apparatus for manufacturing a display panel, and a method for supporting a substrate are provided. The device for supporting a substrate comprises: a bearing mechanism being provided with a through hole for bearing a substrate; one or more sticky pads on the bearing mechanism surrounding the through hole, which are used for fixing the substrate on the bearing mechanism; and an elevating mechanism, which controls lifting and lowering of the substrate by passing through the through hole, wherein a top of the lifting mechanism is provided with a light-emitting member that emits light when in contact with the substrate, to illuminate the one or more sticky pads such that stickiness of the sticky pads is reduced from a first stickiness to a second stickiness.

Claims19

Dependent claims

A supporting device for supporting a substrate, comprising:

a bearing mechanism being provided with a through hole for bearing a substrate;
one or more sticky pads on the bearing mechanism surrounding the through hole, which are used for fixing the substrate on the bearing mechanism;
and
an elevating mechanism, which controls lifting and lowering of the substrate by passing through the through hole,
wherein a top of the lifting mechanism is provided with a light-emitting member that emits light when in contact with the substrate, to illuminate the one or more sticky pads such that stickiness of the sticky pads is reduced from a first stickiness to a second stickiness.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

16/327,425Filed 8 Jun 2018

Priority

CN 201710839317.815 Sep 2017

Published

US 2020/0176300 A14 Jun 2020

Granted

16 Mar 2021

Term ends

Not estimatedThe source records don’t support an estimate.

Classification5 codes

H10P 72/7604
Using mechanical means, e.g. clamps or pinches: the wafers being placed on a susceptor, stage or support
H10P 72/7614
The wafers being placed on a susceptor, stage or support: characterised by a plurality of individual support members, e.g. support posts or…
H10P 72/04
Handling or holding of wafers, substrates or devices during manufacture or treatment thereof: apparatus for manufacture or treatment
H10P 72/7612
The wafers being placed on a susceptor, stage or support: characterised by lifting arrangements, e.g. lift pins

Device for supporting substrate, apparatus for manufacturing display panel, and method for supporting substrate

Life of this patent

Device for supporting substrate, apparatus for manufacturing display panel, and method for supporting substrate

Life of this patent

Abstract

Claims19