Electronic device manufacturing load port apparatus, systems, and methods
AssigneeApplied Materials, Inc.
InventorLuke W. Bonecutter
Life of this patent
Estimating the term…
Abstract
A load port includes a panel including a back surface configured to face a front side of a housing of a factory interface. A groove formed in the back surface extends along an outer portion of the panel. The groove includes a flared base region and a neck region that extends to the flared base region. The load port further includes a seal seated in the groove. The seal is configured to engage the front side of the housing responsive to the panel being coupled to the front side of the housing.
Claims20
A load port comprising:
- a panel comprising a back surface configured to face a front side of a housing of a factory interface of an electronic device manufacturing system, wherein a load lock is configured to couple to a second side of the housing of the factory interface, wherein a groove formed in the back surface extends along an outer portion of the panel, and wherein the groove comprises a flared base region and a neck region that extends to the flared base region;
- and
- a seal at least partially seated in the groove formed in the back surface of the load port, the seal configured to engage the front side of the housing of the factory interface responsive to the panel being coupled to the front side of the housing.
A factory interface of an electronic device manufacturing system, the factory interface comprising:
- a housing having a front side and a second side, the second side of the housing being configured to couple to a load lock;
- and
- a load port comprising:
- a panel comprising a back surface configured to face the front side of the housing, wherein a groove formed in the back surface extends along an outer portion of the panel, and wherein the groove comprises a flared base region and a neck region that extends to the flared base region;
- and
- a seal at least partially seated in the groove formed in the back surface of the load port, the seal configured to engage the front side of the housing of the factory interface responsive to the panel being coupled to the front side of the housing.
A method comprising:
- coupling a panel of a load port to a front side of housing of a factory interface, wherein a load lock is coupled to a second side of the housing of the factory interface, wherein the panel comprises a back surface configured to face the front side of the housing, wherein a groove formed in the back surface extends along an outer portion of the panel, and wherein the groove comprises a flared base region and a neck region that extends to the flared base region;
- and
- responsive to the coupling of the panel to the front side of the housing, engaging a seal at least partially seated in the groove formed in the back surface of the load port with the front side of the housing of the factory interface.
Dependencies are inferred from the claim text.