Gas supply mechanism and semiconductor manufacturing system

A semiconductor manufacturing system comprising a gas supply mechanism for supplying a gas from a gas source to a semiconductor manufacturing apparatus,

• the gas supply mechanism comprising:
• a pipe configured to connect the gas source and the semiconductor manufacturing apparatus to each other;
• and
• a valve provided in the pipe and configured to control a flow rate of the gas which is supplied from the gas source to the semiconductor manufacturing apparatus,
• wherein the valve includes a housing in which a cylindrical internal space is formed in the inside, and a columnar shaft,
• wherein the housing includes an inlet and an outlet, and a gas flows from the gas source into the internal space through the inlet, and a gas flows from the internal space to the semiconductor manufacturing apparatus through the outlet,
• wherein a gap is provided between an outer peripheral surface of the shaft and an inner wall surface of the housing, and the shaft is accommodated in the internal space of the housing and is rotatable about an axis of the shaft, and
• wherein a through hole which penetrates the shaft is formed on the outer peripheral surface of the shaft, both ends of the through hole are formed on the outer peripheral surface of the shaft, both ends of the through hole correspond to the inlet and the outlet, and an axis of the shaft is fixed in a direction orthogonal to the direction in which the gas flows into the inlet of the housing and the direction in which the gas flows out of the outlet of the housing.

A valve for controlling a flow rate of a gas supplied to a semiconductor manufacturing apparatus, comprising:

• a gas inlet;
• a gas outlet;
• a housing disposed between the gas inlet and the gas outlet, the gas outlet connected to the semiconductor manufacturing apparatus;
• and
• a shaft accommodated in the housing and configured to rotate about an axis of the shaft, the shaft including a through hole, wherein both ends of the through hole are formed on an outer peripheral surface of the shaft, and both ends of the through hole correspond to the inlet and the outlet,
• wherein an axis of the shaft is fixed in a direction orthogonal to the direction in which the gas flows into the gas inlet and the direction in which the gas flows out of the outlet.

A gas supply mechanism for supplying a gas from a gas source to a semiconductor manufacturing apparatus, comprising:

• a pipe configured to connect the gas source and the semiconductor manufacturing apparatus to each other;
• a valve provided in the pipe and configured to control a flow rate of the gas which is supplied from the gas source to the semiconductor manufacturing apparatus;
• a drive unit configured to rotate the shaft about the axis of the shaft;
• and
• a control unit configured to control the drive unit,
• wherein the valve includes a housing in which a cylindrical internal space is formed in the inside, and a columnar shaft,
• wherein the housing includes an inlet and an outlet, and a gas flows from the gas source into the internal space through the inlet, and a gas flows from the internal space to the semiconductor manufacturing apparatus through the outlet,
• wherein a gap is provided between an outer peripheral surface of the shaft and an inner wall surface of the housing, and the shaft is accommodated in the internal space of the housing and is rotatable about an axis of the shaft,
• wherein a through hole which penetrates the shaft is formed on the outer peripheral surface of the shaft, both ends of the through hole are formed on the outer peripheral surface of the shaft, and both ends of the through hole correspond to the inlet and the outlet, and an axis of the shaft is fixed in a direction orthogonal to the direction in which the gas flows into the inlet of the housing and the direction in which the gas flows out of the outlet of the housing,
• wherein the drive unit includes a rotary shaft and a drive-side magnet which is provided in the rotary shaft,
• wherein a driven-side magnet which is disposed to face the drive-side magnet via a side wall of housing is fixed to the shaft,
• wherein the side wall of the housing is a nonmagnetic material, and
• wherein the drive-side magnet is magnetically connected to the driven-side magnet via the side wall of the housing, and the rotary shaft rotates in response to rotation of the drive-side magnet.