Shrouds and substrate treating systems including the same

A substrate treating system using plasma, the substrate treating system comprising:

• a process chamber comprising a bottom wall, a top wall that is spaced apart from the bottom wall in a vertical direction, and a sidewall connected to the bottom wall and the top wall;
• an upper electrode that is in the process chamber and is spaced apart from the top wall of the process chamber creating a receiving space for a process gas therebetween;
• a heating unit that is in the process chamber and contacts the top wall of the process chamber, the heating unit being spaced apart from the upper electrode and configured to heat the process gas within the receiving space to produce plasma, the heating unit being ring-shaped;
• and
• a shroud that is in the process chamber and is configured to contain the plasma therein, wherein the shroud comprises:
• a sidewall portion facing the sidewall of the process chamber and having a cylinder shape;
• a first flange portion extending horizontally and radially inward from the sidewall portion of the shroud and facing the bottom wall of the process chamber;
• and
• a plurality of exhaust holes, each of the plurality of exhaust holes extending continuously from the sidewall portion to the first flange portion,
• wherein each of the plurality of exhaust holes comprises:
• a first slit extending through a thickness of the first flange portion of the shroud, and having an open end at the sidewall portion, and an opposite closed end;
• and
• a second slit having an open end and an opposite closed end, and extending perpendicularly through a thickness of the sidewall portion of the shroud, the open end of the second slit being connected to the open end of the first slit, and
• wherein the first flange portion defines an opening, and the first slits of the plurality of exhaust holes are arranged along a circumference of the opening of the first flange portion.

A shroud configured to provide a space for plasma in a process chamber, the shroud comprising:

• a sidewall portion having a cylinder shape;
• and
• a first flange portion having a ring shape, the first flange portion extending horizontally and radially inward from the sidewall portion,
• wherein the sidewall portion comprises opposing ends that are spaced apart from each other in a vertical direction, and the first flange portion extends from a lower end of the opposing ends of the sidewall portion,
• wherein the first flange portion comprises a plurality of first slits, and each of the plurality of first slits extends through a thickness of the first flange portion and extends radially inward from the sidewall portion, each of the plurality of first slits having an open end at the sidewall portion and an opposite closed end, and
• wherein the sidewall portion comprises a plurality of second slits, and each of the plurality of second slits extends through a thickness of the sidewall portion and has an open end and an opposite closed end, and wherein the open end of each of the plurality of second slits in the sidewall portion connects to, and extends longitudinally, generally perpendicularly from the open end of one of the plurality of first slits in the first flange portion toward an upper end of the opposing ends of the sidewall portion.