Photoelectric conversion device and manufacturing method and apparatus thereof

A method for manufacturing a photoelectric conversion device, the method comprising:

• forming a laminate structure of
• a substrate,
• a transparent electrode comprising indium tin oxide,
• an active layer produced by wet-coating, and
• a counter electrode, stacked in this order;
• and thereafter
• forming a cavity by
• (a) pressing an adhesive material just against a defect formed on a surface of said counter electrode, and then peeling off said adhesive material together with said defect and a peripheral part of said defect;
• or
• (b) sucking a defect formed on the surface of said counter electrode, so as to remove said defect and a peripheral part of said defect,
• wherein said cavity penetrates through the counter electrode and unreached to the transparent electrode,
• wherein said method further comprises:
• depositing indium tin oxide on said substrate at a temperature of 100° C. or below;
• and then;
• annealing at a temperature of 200° C. or below and
• wherein said cavity has an opening area larger in said counter electrode than in said active layer and is 1 mm2 or more and 4 mm2 or less.