Display of spectra contour plots versus time for semiconductor processing system control
AssigneeApplied Materials, Inc.
InventorsJeffrey Drue David, Harry Q. Lee, Dominic J. Benvegnu, Boguslaw A. Swedek
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Abstract
A method to assist in identifying a spectral feature and a characteristic of the selected spectral feature to monitor during polishing includes polishing a test substrate and measuring a sequence of spectra of light reflected from a substrate while the substrate is being polished, where at least some of the spectra of the sequence differ due to material being removed during the polishing. The sequence of spectra are visually displayed as a contour plot.
Claims14
A method to assist in selecting a spectral feature and a characteristic of the selected spectral feature to monitor during polishing, comprising:
- polishing a test substrate;
- measuring a sequence of spectra of light reflected from the substrate while the substrate is being polished with an in-situ monitoring system, at least some of the spectra of the sequence differing due to material being removed during the polishing;
- receiving the measurements of the sequence of spectra from the in-situ monitoring system in a computer;
- and
- visually displaying the sequence of spectra as a contour plot of the spectra having intensity values of the spectra as a function of wavelength within a spectrum along a first axis and as a function of a measurement time of the spectrum within the sequence of spectra along a second axis on a computer monitor by the computer.
A non-transitory computer program product for assisting in selecting a spectral feature and a characteristic of the selected spectral feature to monitor during polishing, the computer program product comprising instructions to cause a processor to:
- during polishing of a test substrate, receive from an in-situ monitoring system measurements of a sequence of spectra of light reflected from the test substrate, at least some of the spectra of the sequence differing due to material being removed during the polishing;
- cause a computer monitor to visually display the sequence of spectra as a contour plot of the spectra having intensity values of the spectra as a function of wavelength within a spectrum along a first axis and as a function of a measurement time of the spectrum within the sequence of spectra along a second axis on a computer monitor by the computer.
Dependencies are inferred from the claim text.