Liquid dispensing apparatus measuring condition of liquid and method of controlling the same, and imprint apparatus
AssigneeCanon Kabushiki Kaisha
InventorsHisashi Namba, Yuichi Takahashi
Life of this patent
Estimating the term…
Abstract
An imprint apparatus comprises: a dispensing unit that dispenses a liquid to a substrate; a first measurement unit that measures a time from when a signal for causing the liquid to be dispensed is outputted to the dispensing unit until when the dispensed liquid passes through a predetermined position; a second measurement unit that measures a position of the liquid on the substrate that is dispensed by the dispensing unit; and a control unit that controls the measurement by the first measurement unit and the second measurement unit, wherein the control unit performs measurement by the second measurement unit based on a measurement result by the first measurement unit.
Claims22
A liquid dispensing apparatus comprising:
- a dispensing unit configured to dispense a liquid to a medium;
- a first measurement unit configured to measure a condition of the liquid dispensed by the dispensing unit;
- a second measurement unit configured to measure a position of the liquid on the medium that is dispensed by the dispensing unit;
- and
- a control unit configured to perform measurement by the second measurement unit based on a measurement result by the first measurement unit.
A method of controlling a liquid dispensing apparatus including a dispensing unit configured to dispense a liquid to a medium, the method comprising:
- performing a first measurement of a condition of the liquid dispensed by the dispensing unit;
- and
- performing a second measurement of a position of the liquid on the medium that is dispensed by the dispensing unit based on a measurement result of the first measurement.
An imprint apparatus comprising:
- a dispensing unit configured to dispense a liquid to a substrate;
- a light source arranged below the dispensing unit and configured to emit laser;
- a detecting unit configured to detect the laser and to measure a condition of the liquid dispensed by the dispensing unit;
- a scope configured to measure a position of the liquid on the substrate that is dispensed by the dispensing unit;
- and
- a control unit configured to perform measurement by the scope based on a measurement result by the detecting unit.
Dependencies are inferred from the claim text.