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US 10,948,824 B2Granted
Dispensing nozzle design and dispensing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei Chang Cheng, Chi-Hung Liao
Life of this patent
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Abstract
An apparatus for dispensing fluid includes a fluid source; a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source; and a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore.
Claims12
An apparatus for dispensing fluid, comprising:
- a fluid source;
- a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source;
- and
- a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore, and wherein the inner and outer layers are made of elastic material.
1 more element
Dependencies are inferred from the claim text.