Back to results
US 10,948,823 B2Granted
Laminate and pattern forming method
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsSatoshi Asai, Kyoko Soga, Hideto Kato
Life of this patent
Estimating the term…
Abstract
To provide a laminate which enables pattern formation with excellent opening shape even in the case where a chemically amplified negative type resist material is used, and a pattern forming method in which the laminate is used. The laminate includes a chemically amplified negative type resist layer, and a basic resin coat layer thereon that contains 0.001 to 10% by weight of a basic compound having a molecular weight of up to 10,000.
Claims7
A laminate comprising:
- a chemically amplified negative type resist layer;
- and
- a basic resin coat layer on the chemically amplified negative type resist layer that contains 0.001 to 10% by weight of a basic compound having a molecular weight of up to 10,000,
- wherein the chemically amplified negative type resist layer comprises:
- (A) a siloxane skeleton-containing polymer compound having a weight average molecular weight of 3,000 to 500,000 and represented by the following formula (1):
- wherein R1 to R4 are each independently a monovalent hydrocarbon group having 1 to 8 carbon atoms, m is an integer of 1 to 100, a, b, c, and d are numbers satisfying 0≤a≤1, 0≤b≤1, 0≤c≤1, 0≤d≤1, 0<a+b≤1, and a+b+c+d=1, X is a divalent organic group represented by the following formula (2), Y is a divalent organic group represented by the following formula (3):
- wherein Z1 and Z2 are each independently a single bond or a divalent organic group selected from among the following,
- R5 to R8 are each independently an alkyl group or alkoxyl group having 1 to 4 carbon atoms, and k and h are each independently 0, 1 or 2;
- (B) a polyhydric phenol compound containing at least three hydroxyl groups;
- (C) a photo acid generator that generates an acid by being decomposed by light having a wavelength of 190 to 500 nm;
- and
- (D) at least one crosslinking agent selected from among an amino condensate modified with formaldehyde or formaldehyde-alcohol, a phenol compound containing an average of at least two methylol groups or alkoxymethylol groups in one molecule thereof, and a compound obtained by substituting a hydroxyl group of a polyhydric phenol with a glycidoxyl group, and
- wherein the resin coat layer contains at least one resin selected from among epoxy resins, phenolic resins, silicone resins which are siloxane skeleton-containing polymer compounds represented by the formula (1), polyester resins, polyurethane resins, and polyimide resins.
10 more elements
A laminate comprising:
- a chemically amplified negative type resist layer;
- and
- a basic resin coat layer on the chemically amplified negative type resist layer that contains 0.001 to 10% by weight of a basic compound having a molecular weight of up to 10,000,
- wherein the chemically amplified negative type resist layer is formed using a composition comprising:
- (A) a siloxane skeleton-containing polymer compound having a weight average molecular weight of 3,000 to 500,000 and represented by the following formula (1):
- wherein R1 to R4 are each independently a monovalent hydrocarbon group having 1 to 8 carbon atoms, m is an integer of 1 to 100, a, b, c, and d are numbers satisfying 0≤a≤1, 0≤b≤1, 0≤c≤1, 0≤d≤1, 0<a+b≤1, and a+b+c+d=1, X is a divalent organic group represented by the following formula (2), Y is a divalent organic group represented by the following formula (3):
- wherein Z1 and Z2 are each independently a single bond or a divalent organic group selected from among the following,
- R5 to R8 are each independently an alkyl group or alkoxyl group having 1 to 4 carbon atoms, and k and h are each independently 0, 1 or 2;
- (B) a polyhydric phenol compound containing at least three hydroxyl groups;
- (C) a photo acid generator that generates an acid by being decomposed by light having a wavelength of 190 to 500 nm;
- (D) at least one crosslinking agent selected from among an amino condensate modified with formaldehyde or formaldehyde-alcohol, a phenol compound containing an average of at least two methylol groups or alkoxymethylol groups in one molecule thereof, and a compound obtained by substituting a hydroxyl group of a polyhydric phenol with a glycidoxyl group;
- and
- (G) a solvent, and
- wherein the resin coat layer contains at least one resin selected from among epoxy resins, phenolic resins, silicone resins which are siloxane skeleton-containing polymer compounds represented by the formula (1), polyester resins, polyurethane resins, and polyimide resins.
11 more elements
A laminate comprising:
- a chemically amplified negative type resist layer;
- and
- a basic resin coat layer on the chemically amplified negative type resist layer that contains 0.001 to 10% by weight of a basic compound having a molecular weight of up to 10,000,
- wherein the chemically amplified negative type resist layer comprises:
- (A) a siloxane skeleton-containing polymer compound having a weight average molecular weight of 3,000 to 500,000 and represented by the following formula (1):
- wherein R1 to R4 are each independently a monovalent hydrocarbon group having 1 to 8 carbon atoms, m is an integer of 1 to 100, a, b, c, and d are numbers satisfying 0≤a≤1, 0≤b≤1, 0≤c≤1, 0≤d≤1, 0<a+b≤1, and a+b+c+d=1, X is a divalent organic group represented by the following formula (2), Y is a divalent organic group represented by the following formula (3):
- wherein Z1 and Z2 are each independently a single bond or a divalent organic group selected from among the following,
- R5 to R8 are each independently an alkyl group or alkoxyl group having 1 to 4 carbon atoms, and k and h are each independently 0, 1 or 2;
- (B) a polyhydric phenol compound containing at least three hydroxyl groups;
- (C) a photo acid generator that generates an acid by being decomposed by light having a wavelength of 190 to 500 nm;
- and
- (D) at least one crosslinking agent selected from among an amino condensate modified with formaldehyde or formaldehyde-alcohol, a phenol compound containing an average of at least two methylol groups or alkoxymethylol groups in one molecule thereof, and a compound obtained by substituting a hydroxyl group of a polyhydric phenol with a glycidoxyl group, and
- wherein the resin coat layer contains at least one resin selected from among epoxy resins, phenolic resins, silicone resins, polyester resins, polyurethane resins, and polyimide resins, and
- wherein the thickness of the basic resin coat layer is 1 to 100 μm.
11 more elements
A laminate comprising:
- a chemically amplified negative type resist layer;
- and
- a basic resin coat layer on the chemically amplified negative type resist layer that contains 0.001 to 10% by weight of a basic compound having a molecular weight of up to 10,000,
- wherein the chemically amplified negative type resist layer is formed using a composition comprising:
- (A) a siloxane skeleton-containing polymer compound having a weight average molecular weight of 3,000 to 500,000 and represented by the following formula (1):
- wherein R1 to R4 are each independently a monovalent hydrocarbon group having 1 to 8 carbon atoms, m is an integer of 1 to 100, a, b, c, and d are numbers satisfying 0≤a≤1, 0≤b≤1, 0≤c≤1, 0≤d≤1, 0<a+b≤1, and a+b+c+d=1, X is a divalent organic group represented by the following formula (2), Y is a divalent organic group represented by the following formula (3):
- wherein Z1 and Z2 are each independently a single bond or a divalent organic group selected from among the following,
- R5 to R8 are each independently an alkyl group or alkoxyl group having 1 to 4 carbon atoms, and k and h are each independently 0, 1 or 2;
- (B) a polyhydric phenol compound containing at least three hydroxyl groups;
- (C) a photo acid generator that generates an acid by being decomposed by light having a wavelength of 190 to 500 nm;
- (D) at least one crosslinking agent selected from among an amino condensate modified with formaldehyde or formaldehyde-alcohol, a phenol compound containing an average of at least two methylol groups or alkoxymethylol groups in one molecule thereof, and a compound obtained by substituting a hydroxyl group of a polyhydric phenol with a glycidoxyl group;
- and
- (G) a solvent, and
- wherein the resin coat layer contains at least one resin selected from among epoxy resins, phenolic resins, silicone resins, polyester resins, polyurethane resins, and polyimide resins, and
- wherein the thickness of the basic resin coat layer is 1 to 100 μm.
12 more elements
Dependencies are inferred from the claim text.