Mold-forming substrate and inspection method

A circular mold-forming substrate comprising:

• an outer area and a circular mold role area;
• wherein the circular mold-forming substrate has a diameter of 125 mm to 300 mm;
• wherein the circular mold role area is an area that is capable of forming a topological pattern;
• wherein the outer area surrounds the circular mold role area;
• wherein the circular mold role area has a diameter of up to 125 mm;
• wherein a variation of thickness of the circular mold role area is up to 2 μm;
• wherein the circular mold-forming substrate satisfies the relationship:
• T≥C≥E;
• wherein within the circular mold role area has a thickness T at the thickest point t that first comes in contact with a resin layer on a recipient substrate, a thickness C at the center c, and a thickness E at point e that is the intersection between line t-c and the periphery of the circular mold role area which is remote from t and last comes in contact with the resin layer on the recipient substrate;
• and
• wherein the circular mold-forming substrate satisfies the relationship:
• 0.6 μm≥T-E≥0.3 μm.